The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011) is one of the premier annual events reporting research results on every aspect of microsystems technology. This Conference reflects the rapid proliferation of the commitment and success of the microsystems research community. In recent years, the IEEE MEMS Conference has attracted more than 700 participants, 800+ abstract submissions and has created the forum to present over 200 select papers in podium and poster/oral sessions. Its single-session format provides ample opportunity for interaction between attendees, presenters and exhibitors. MEMS 2011 will be held in Cancun, Mexico on January 23 - 27, 2011 at the Hilton Cancun Golf and Spa Resort.